Granted Patent
Utility
US 6,812,148 · App. 10/219,094
Preventing gate oxice thinning effect in a recess LOCOS process
Inventors:
Chieh-Ju Chang, Tsai-Sen Lin, Chon-Shin Jou, Yifu Chung
Patented Case
View Patent ↗
Granted: Nov 2, 2004
Filed: Aug 13, 2002
Inventors
Chieh-Ju Chang
Tsai-Sen Lin
Chon-Shin Jou
Yifu Chung
Assignee (at issue)
MOSEL VITELIC INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.