IP Library › Granted Patent US 6,812,155
Granted Patent Utility
US 6,812,155 · App. 10/342,796

Pattern formation method

Inventor: Masashi Fujimoto
Patented Case View Patent ↗
Granted: Nov 2, 2004 Filed: Jan 15, 2003
Inventor
Masashi Fujimoto
Assignee (at issue)
NEC Electronics Corporation

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Quick Facts
Patent No.
US 6,812,155
App. No.
10/342,796
Filed
2003-01-15
Granted
2004-11-02
Kind
B2