Granted Patent
Utility
US 6,813,034 · App. 10/243,245
Analysis of isolated and aperiodic structures with simultaneous multiple angle of incidence measurements
Inventors:
Allan Rosencwaig, Jon Opsal
Patented Case
View Patent ↗
Granted: Nov 2, 2004
Filed: Sep 13, 2002
Inventors
Allan Rosencwaig
Jon Opsal
Assignee (at issue)
Therma-Wave, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.