IP Library › Granted Patent US 6,813,060
Granted Patent Utility
US 6,813,060 · App. 10/316,172

Electrical latching of microelectromechanical devices

Inventors: Ernest J. Garcia, Gerard E. Sleefe
Patented Case View Patent ↗
Granted: Nov 2, 2004 Filed: Dec 9, 2002
Inventors
Ernest J. Garcia
Gerard E. Sleefe
Assignee (at issue)
Sandia Corporation

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Quick Facts
Patent No.
US 6,813,060
App. No.
10/316,172
Filed
2002-12-09
Granted
2004-11-02
Kind
B1