Granted Patent
Utility
US 6,813,098 · App. 10/336,066
Variable numerical aperture large-field unit-magnification projection system
Inventor:
Romeo I. Mercado
Patented Case
View Patent ↗
Granted: Nov 2, 2004
Filed: Jan 2, 2003
Inventor
Romeo I. Mercado
Assignee (at issue)
Ultratech
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.