Granted Patent
Utility
US 6,813,376 · App. 09/697,807
System and method for detecting defects on a structure-bearing surface using optical inspection
Inventors:
Kathleen Hennessey, Youling Lin, Yongqiang Liu, Veera V. S. Khaja, Yonghang Fu
Patented Case
View Patent ↗
Granted: Nov 2, 2004
Filed: Oct 27, 2000
Inventors
Kathleen Hennessey
Youling Lin
Yongqiang Liu
Veera V. S. Khaja
Yonghang Fu
Assignee (at issue)
Rudolph Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.