Granted Patent
Utility
US 6,814,834 · App. 10/160,528
Apparatus and method for reducing removal forces for CMP pads
Inventor:
Trent Ward
Patented Case
View Patent ↗
Granted: Nov 9, 2004
Filed: May 31, 2002
Inventor
Trent Ward
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.