Granted Patent
Utility
US 6,814,855 · App. 09/931,283
Automated chemical management system having improved analysis unit
Inventors:
Lyndon Graham, Dakin Fulton
Patented Case
View Patent ↗
Granted: Nov 9, 2004
Filed: Aug 16, 2001
Inventors
Lyndon Graham
Dakin Fulton
Assignee (at issue)
Semitool, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.