Granted Patent
Utility
US 6,815,148 · App. 10/173,037
Method of manufacturing a semiconductor device and designing a mask pattern
Inventor:
Akira Matsumoto
Patented Case
View Patent ↗
Granted: Nov 9, 2004
Filed: Jun 18, 2002
Inventor
Akira Matsumoto
Assignee (at issue)
NEC Electronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.