Granted Patent
Utility
US 6,815,237 · App. 10/675,680
Testing apparatus and method for determining an etch bias associated with a semiconductor-processing step
Inventors:
James Chingwei Li, Richard L. Pierson, Jr., Berinder Brar
Patented Case
View Patent ↗
Granted: Nov 9, 2004
Filed: Sep 29, 2003
Inventors
James Chingwei Li
Richard L. Pierson, Jr.
Berinder Brar
Assignee (at issue)
Rockwell Scientific Licensing LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.