Granted Patent
Utility
US 6,815,633 · App. 09/804,650
Inductively-coupled toroidal plasma source
Inventors:
Xing Chen, William M. Holber, Andrew Cowe, Eric Georgelis, Ilya M. Bystyak, Andrzej Bortkiewicz
Patented Case
View Patent ↗
Granted: Nov 9, 2004
Filed: Mar 12, 2001
Inventors
Xing Chen
William M. Holber
Andrew Cowe
Eric Georgelis
Ilya M. Bystyak
Andrzej Bortkiewicz
Assignee (at issue)
Applied Science & Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.