Granted Patent
Utility
US 6,815,700 · App. 10/189,824
Plasma focus light source with improved pulse power system
Inventors:
Stephan T. Melnychuk, William N. Partlo, Igor V. Fomenkov, I. Roger Oliver, Richard M. Ness, Norbert Bowering, Oleh Khodykin
Patented Case
View Patent ↗
Granted: Nov 9, 2004
Filed: Jul 3, 2002
Inventors
Stephan T. Melnychuk
William N. Partlo
Igor V. Fomenkov
I. Roger Oliver
Richard M. Ness
Norbert Bowering
Oleh Khodykin
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.