Granted Patent
Utility
US 6,815,947 · App. 10/459,711
Method and system for thickness measurements of thin conductive layers
Inventors:
David Scheiner, Yoav Many, Rahamin Guliamov, Shahar Gov
Patented Case
View Patent ↗
Granted: Nov 9, 2004
Filed: Jun 12, 2003
Inventors
David Scheiner
Yoav Many
Rahamin Guliamov
Shahar Gov
Assignee (at issue)
NOVA MEASURING INSTRUMENTS INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.