IP Library Granted Patent US 6,816,236
Granted Patent Utility
US 6,816,236 · App. 10/101,069

Projection optical system and projection and light exposure apparatus using it

Inventor: Ryoko Otomo
Patented Case View Patent ↗
Granted: Nov 9, 2004 Filed: Mar 20, 2002
Inventor
Ryoko Otomo
Assignee (at issue)
Fuji Photo Optical Co., Ltd.

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Quick Facts
Patent No.
US 6,816,236
App. No.
10/101,069
Filed
2002-03-20
Granted
2004-11-09
Kind
B2