Granted Patent
Utility
US 6,816,253 · App. 09/685,772
Substrate holder, and use of the substrate holder in a highly accurate measuring instrument
Inventors:
Carola Blaesing-Bangert, Ulrich Kaczynski
Patented Case
View Patent ↗
Granted: Nov 9, 2004
Filed: Oct 11, 2000
Inventors
Carola Blaesing-Bangert
Ulrich Kaczynski
Assignee (at issue)
Leica Microsystems Semiconductor GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.