IP Library › Granted Patent US 6,816,294
Granted Patent Utility
US 6,816,294 · App. 10/077,691

On-the-fly beam path error correction for memory link processing

Inventors: Mark A. Unrath, Kelly J. Bruland, Ho Wai Lo, Stephen Swaringen
Patented Case View Patent ↗
Granted: Nov 9, 2004 Filed: Feb 15, 2002
Inventors
Mark A. Unrath
Kelly J. Bruland
Ho Wai Lo
Stephen Swaringen
Assignee (at issue)
Electro Scientific Industries, Inc.

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Quick Facts
Patent No.
US 6,816,294
App. No.
10/077,691
Filed
2002-02-15
Granted
2004-11-09
Kind
B2