IP Library › Granted Patent US 6,817,003
Granted Patent Utility
US 6,817,003 · App. 10/402,079

Short edge management in rule based OPC

Inventors: George P. Lippincott, Kyohei Sakajiri, Laurence W. Grodd
Patented Case View Patent ↗
Granted: Nov 9, 2004 Filed: Mar 26, 2003
Inventors
George P. Lippincott
Kyohei Sakajiri
Laurence W. Grodd

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Quick Facts
Patent No.
US 6,817,003
App. No.
10/402,079
Filed
2003-03-26
Granted
2004-11-09
Kind
B2