Granted Patent
Utility
US 6,817,073 · App. 10/287,797
Method of manufacturing a thin film piezoelectric element
Inventors:
Hirokazu Uchiyama, Yuko Ogawa, Hiroyuki Kita
Patented Case
View Patent ↗
Granted: Nov 16, 2004
Filed: Nov 5, 2002
Inventors
Hirokazu Uchiyama
Yuko Ogawa
Hiroyuki Kita
Assignee (at issue)
SUMITOMO ELECTRIC INDUSTRIES, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.