Granted Patent
Utility
US 6,818,095 · App. 10/720,415
Chemical mechanical polishing apparatus
Inventor:
Hyung Jun Kim
Patented Case
View Patent ↗
Granted: Nov 16, 2004
Filed: Nov 24, 2003
Inventor
Hyung Jun Kim
Assignee (at issue)
SK hynix Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.