Granted Patent
Utility
US 6,818,532 · App. 10/118,318
Method of etching substrates
Inventors:
Geun-Young Yeom, Myung Cheol Yoo, Wolfram Urbanek, Youn Joon Sung, Chang-hyun Jeong, Kyong-Nam Kim, Dong Woo Kim
Patented Case
View Patent ↗
Granted: Nov 16, 2004
Filed: Apr 9, 2002
Inventors
Geun-Young Yeom
Myung Cheol Yoo
Wolfram Urbanek
Youn Joon Sung
Chang-hyun Jeong
Kyong-Nam Kim
Dong Woo Kim
Assignee (at issue)
Oriol Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.