Granted Patent
Utility
US 6,818,783 · App. 10/323,480
Volatile precursors for deposition of metals and metal-containing films
Inventors:
John Anthony Thomas Norman, David A. Roberts, Morteza Farnia, Melanie Boze
Patented Case
View Patent ↗
Granted: Nov 16, 2004
Filed: Dec 19, 2002
Inventors
John Anthony Thomas Norman
David A. Roberts
Morteza Farnia
Melanie Boze
Assignee (at issue)
Air Products and Chemicals, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.