Granted Patent
Utility
US 6,818,864 · App. 10/217,230
LED heat lamp arrays for CVD heating
Inventor:
John C. Ptak
Patented Case
View Patent ↗
Granted: Nov 16, 2004
Filed: Aug 9, 2002
Inventor
John C. Ptak
Assignee (at issue)
ASM America, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.