Granted Patent
Utility
US 6,819,402 · App. 10/270,561
System and method for laser beam expansion
Inventors:
Walter Augustyn, James Tsacoyeanes
Patented Case
View Patent ↗
Granted: Nov 16, 2004
Filed: Oct 16, 2002
Inventors
Walter Augustyn
James Tsacoyeanes
Assignee (at issue)
ASML Holding N.V.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.