Granted Patent
Utility
US 6,819,425 · App. 09/928,462
Lithographic apparatus, device manufacturing method, and device manufactured thereby
Inventor:
Yim-Bun Patrick Kwan
Patented Case
View Patent ↗
Granted: Nov 16, 2004
Filed: Aug 22, 2001
Inventor
Yim-Bun Patrick Kwan
Assignee (at issue)
ASML NETHERLANDS B.V.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.