Granted Patent
Utility
US 6,819,490 · App. 10/238,177
Homogenization of a spatially coherent radiation beam and printing and inspection, respectively, of a pattern on a workpiece
Inventors:
Torbjorn Sandstrom, Anna-Karin Holmer, Kenneth Wilhelmsson
Patented Case
View Patent ↗
Granted: Nov 16, 2004
Filed: Sep 10, 2002
Inventors
Torbjorn Sandstrom
Anna-Karin Holmer
Kenneth Wilhelmsson
Assignee (at issue)
Micronic Laser Systems AB
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.