Granted Patent
Utility
US 6,820,028 · App. 10/763,433
Method and apparatus for monitoring integrated circuit fabrication
Inventors:
Jun Ye, Xun Chen
Patented Case
View Patent ↗
Granted: Nov 16, 2004
Filed: Jan 23, 2004
Inventors
Jun Ye
Xun Chen
Assignee (at issue)
Brion Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.