Granted Patent
Utility
US 6,821,397 · App. 10/225,717
Method for controlling plasma density or the distribution thereof
Inventor:
Siegfried Krassnitzer
Patented Case
View Patent ↗
Granted: Nov 23, 2004
Filed: Aug 22, 2002
Inventor
Siegfried Krassnitzer
Assignee (at issue)
Unaxis Balzers Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.