Granted Patent
Utility
US 6,821,409 · App. 10/117,991
Electroetching methods and systems using chemical and mechanical influence
Inventors:
Bulent M. Basol, Cyprian Emeka Uzoh, Paul Lindquist, Homayoun Talieh
Patented Case
View Patent ↗
Granted: Nov 23, 2004
Filed: Apr 5, 2002
Inventors
Bulent M. Basol
Cyprian Emeka Uzoh
Paul Lindquist
Homayoun Talieh
Assignee (at issue)
ASM Nutool, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.