Granted Patent
Utility
US 6,821,685 · App. 10/093,803
Block mask making method, block mask and exposure apparatus
Inventors:
Hiroshi Takita, Hiromi Hoshino
Patented Case
View Patent ↗
Granted: Nov 23, 2004
Filed: Mar 11, 2002
Inventors
Hiroshi Takita
Hiromi Hoshino
Assignee (at issue)
Fujitsu Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.