Granted Patent
Utility
US 6,821,706 · App. 10/627,906
Polymerizable composition, polymer, resist, and process for electron beam lithography
Inventors:
Klaus Elian, Rafael Abargues
Patented Case
View Patent ↗
Granted: Nov 23, 2004
Filed: Jul 25, 2003
Inventors
Klaus Elian
Rafael Abargues
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.