Granted Patent
Utility
US 6,821,713 · App. 10/085,242
Method for lateral trimming of spacers
Inventors:
Allison Holbrook, Jiahua Huang, Sunny Cherian
Patented Case
View Patent ↗
Granted: Nov 23, 2004
Filed: Feb 27, 2002
Inventors
Allison Holbrook
Jiahua Huang
Sunny Cherian
Assignee (at issue)
Advanced Micro Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.