Granted Patent
Utility
US 6,821,897 · App. 10/246,280
Method for copper CMP using polymeric complexing agents
Inventors:
David Schroeder, Phillip W. Carter, Jeffrey P. Chamberlain, Kyle Miller, Isaac K. Cherian
Patented Case
View Patent ↗
Granted: Nov 23, 2004
Filed: Sep 18, 2002
Inventors
David Schroeder
Phillip W. Carter
Jeffrey P. Chamberlain
Kyle Miller
Isaac K. Cherian
Assignee (at issue)
Cabot Microelectronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.