Granted Patent
Utility
US 6,821,913 · App. 10/232,260
Method for forming dual oxide layers at bottom of trench
Inventors:
Chiao-Shun Chuang, Chien-Ping Chang, Mao-Song Tseng, Cheng-Tsung Ni
Patented Case
View Patent ↗
Granted: Nov 23, 2004
Filed: Aug 29, 2002
Inventors
Chiao-Shun Chuang
Chien-Ping Chang
Mao-Song Tseng
Cheng-Tsung Ni
Assignee (at issue)
MOSEL VITELIC INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.