Granted Patent
Utility
US 6,822,191 · App. 10/378,600
Method for producing a trench structure in a polymer substrate
Inventors:
Hubert De Steur, Stefan Lesjak, Wei Pan
Patented Case
View Patent ↗
Granted: Nov 23, 2004
Filed: Mar 5, 2003
Inventors
Hubert De Steur
Stefan Lesjak
Wei Pan
Assignee (at issue)
Siemens Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.