Granted Patent
Utility
US 6,822,248 · App. 09/809,766
Spatial phase locking with shaped electron beam lithography
Inventors:
Juan Ferrera, James G. Goodberlet, Timothy R. Groves, John G. Hartley, Mark K. Mondol, Mark Schattenburg, Henry I. Smith
Patented Case
View Patent ↗
Granted: Nov 23, 2004
Filed: Mar 15, 2001
Inventors
Juan Ferrera
James G. Goodberlet
Timothy R. Groves
John G. Hartley
Mark K. Mondol
Mark Schattenburg
Henry I. Smith
Assignee (at issue)
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.