IP Library Granted Patent US 6,822,413
Granted Patent Utility
US 6,822,413 · App. 10/391,306

Systems and methods incorporating an end effector with a rotatable and/or pivotable body and/or an optical sensor having a light path that extends along a length of the end effector

Inventor: Sean D. Simondet
Patented Case View Patent ↗
Granted: Nov 23, 2004 Filed: Mar 18, 2003
Inventor
Sean D. Simondet
Assignee (at issue)
FSI INTERNATIONAL, INC.

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Quick Facts
Patent No.
US 6,822,413
App. No.
10/391,306
Filed
2003-03-18
Granted
2004-11-23
Kind
B2