Granted Patent
Utility
US 6,823,503 · App. 10/334,566
Method and apparatus for creating a phase-shifting mask for a photolithographic process
Inventor:
Kevin A. Beaudette
Patented Case
View Patent ↗
Granted: Nov 23, 2004
Filed: Dec 31, 2002
Inventor
Kevin A. Beaudette
Assignee (at issue)
Numerical Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.