Granted Patent
Utility
US 6,824,652 · App. 10/330,435
Sputtering target assembly and sputtering apparatus using the same
Inventor:
Jae Yeol Park
Patented Case
View Patent ↗
Granted: Nov 30, 2004
Filed: Dec 30, 2002
Inventor
Jae Yeol Park
Assignee (at issue)
LG Philips LCD Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.