Granted Patent
Utility
US 6,824,697 · App. 10/003,851
Method for fabricating mems and microfluidic devices using smile, latent masking, and delayed locos techniques
Inventors:
James E. Moon, Timothy Joel Davis, Gregory J. Galvin, Kevin A. Shaw, Paul C. Waldrop, Sharlene A. Wilson
Patented Case
View Patent ↗
Granted: Nov 30, 2004
Filed: Nov 2, 2001
Inventors
James E. Moon
Timothy Joel Davis
Gregory J. Galvin
Kevin A. Shaw
Paul C. Waldrop
Sharlene A. Wilson
Assignee (at issue)
Kionix, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.