Granted Patent
Utility
US 6,824,748 · App. 09/872,254
Heated catalytic treatment of an effluent gas from a substrate fabrication process
Inventors:
Tony Kaushal, Shamouil Shamouilian, Harshad Borgaonkar, Kwok Manus Wong, Michael G. Chafin, Ashish Bhatnagar
Patented Case
View Patent ↗
Granted: Nov 30, 2004
Filed: Jun 1, 2001
Inventors
Tony Kaushal
Shamouil Shamouilian
Harshad Borgaonkar
Kwok Manus Wong
Michael G. Chafin
Ashish Bhatnagar
Assignee (at issue)
Applied Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.