IP Library Granted Patent US 6,824,949
Granted Patent Utility
US 6,824,949 · App. 10/008,796

Polybenzoxazole precursors, photoresist solution, polybenzoxazole, and process for preparing a polybenzoxazole precursor

Inventors: Jörg Haussmann, Gerhard Maier, Günter Schmid, Recai Sezi
Patented Case View Patent ↗
Granted: Nov 30, 2004 Filed: Nov 13, 2001
Inventors
Jörg Haussmann
Gerhard Maier
Günter Schmid
Recai Sezi
Assignee (at issue)
Infineon Technologies AG

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Quick Facts
Patent No.
US 6,824,949
App. No.
10/008,796
Filed
2001-11-13
Granted
2004-11-30
Kind
B2