Granted Patent
Utility
US 6,825,075 · App. 10/757,214
Method of fabricating MIM capacitor with the encapsulated metal structure serving as the lower plate
Inventors:
Kevin S. Petrarca, Donald F. Canaperi, Mahadevaiyer Krishnan, Kenneth J. Stein, Richard P. Volant
Patented Case
View Patent ↗
Granted: Nov 30, 2004
Filed: Jan 14, 2004
Inventors
Kevin S. Petrarca
Donald F. Canaperi
Mahadevaiyer Krishnan
Kenneth J. Stein
Richard P. Volant
Assignee (at issue)
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.