Granted Patent
Utility
US 6,825,101 · App. 09/536,927
Methods for annealing a substrate and article produced by such methods
Inventors:
Andrew M. Hawryluk, David A. Markle, Somit Talwar
Patented Case
View Patent ↗
Granted: Nov 30, 2004
Filed: Mar 27, 2000
Inventors
Andrew M. Hawryluk
David A. Markle
Somit Talwar
Assignee (at issue)
Ultratech
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.