Granted Patent
Utility
US 6,825,913 · App. 09/261,080
Reticle with crystal support material and pellicle
Inventors:
Karl-Heinz Schuster, Christian Wagner
Patented Case
View Patent ↗
Granted: Nov 30, 2004
Filed: Mar 2, 1999
Inventors
Karl-Heinz Schuster
Christian Wagner
Assignee (at issue)
Carl Zeiss SMT GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.