Granted Patent
Utility
US 6,825,967 · App. 09/676,459
Shaped electrodes for micro-electro-mechanical-system (MEMS) devices to improve actuator performance and methods for fabricating the same
Inventors:
John Chong, Seung-bok LEE, Noel C. MacDonald, Robert Lewis, Peter Hunt
Patented Case
View Patent ↗
Granted: Nov 30, 2004
Filed: Sep 29, 2000
Inventors
John Chong
Seung-bok LEE
Noel C. MacDonald
Robert Lewis
Peter Hunt
Assignee (at issue)
Calient Networks, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.