Granted Patent
Utility
US 6,826,822 · App. 10/074,859
Method for preparing rubber plate used in an ion implanter
Inventors:
Cheng-Min Pan, Hua-Jen Tseng, Chun-Chieh Lee, Sheng-Feng Hung
Patented Case
View Patent ↗
Granted: Dec 7, 2004
Filed: Feb 11, 2002
Inventors
Cheng-Min Pan
Hua-Jen Tseng
Chun-Chieh Lee
Sheng-Feng Hung
Assignee (at issue)
MOSEL VITELIC INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.