Granted Patent
Utility
US 6,827,635 · App. 10/248,949
Method of planarizing substrates
Inventors:
Peter Lahnor, Olaf Kuehn, Andreas Roemer, Alexander William Simpson
Patented Case
View Patent ↗
Granted: Dec 7, 2004
Filed: Mar 5, 2003
Inventors
Peter Lahnor
Olaf Kuehn
Andreas Roemer
Alexander William Simpson
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.