IP Library › Granted Patent US 6,827,752
Granted Patent Utility
US 6,827,752 · App. 10/333,643

Cerium oxide slurry, and method of manufacturing substrate

Inventors: Haruki Nojo, Akitoshi Yoshida, Pascal Berar
Patented Case View Patent ↗
Granted: Dec 7, 2004 Filed: Mar 12, 2003
Inventors
Haruki Nojo
Akitoshi Yoshida
Pascal Berar
Assignee (at issue)
EKC Technology K.K.

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Quick Facts
Patent No.
US 6,827,752
App. No.
10/333,643
Filed
2003-03-12
Granted
2004-12-07
Kind
B2