Granted Patent
Utility
US 6,828,068 · App. 10/349,629
Binary half tone photomasks and microscopic three-dimensional devices and method of fabricating the same
Inventors:
Christopher J. Progler, Peter Rhyins
Patented Case
View Patent ↗
Granted: Dec 7, 2004
Filed: Jan 23, 2003
Inventors
Christopher J. Progler
Peter Rhyins
Assignee (at issue)
PHOTRONICS, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.