Granted Patent
Utility
US 6,828,217 · App. 10/284,707
Dicing process for GAAS/INP and other semiconductor materials
Inventors:
Hung C. Nguyen, I-Ching T. Yang
Patented Case
View Patent ↗
Granted: Dec 7, 2004
Filed: Oct 31, 2002
Inventors
Hung C. Nguyen
I-Ching T. Yang
Assignee (at issue)
NORTHROP GRUMMAN CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.